Measuring the heat evolved from individual reaction steps in atomic layer deposition

In Situ Reaction Mechanism Studies on Atomic Layer Deposition

Reaction Path Analysis for Atomic Layer Deposition Processes

In this paper, we examine the mathematical structure of thin-film deposition process reaction kinetics models with the goal of determining whether a reaction network can guarantee the self-limiting and stable growth inherent in true atomic layer deposition systems. This analysis is based on identifying reaction invariants and interpreting the chemical significance of these conserved modes. A sp...

Atomic layer deposition: an overview.

Atomic Layer Deposition of TiO

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Atomic Layer Etching: What Can We Learn from Atomic Layer Deposition?

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